Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Sumiya Keiji and Senguttuvan Nachimuthu and Shimizu Shigenori and Aoshima Masahiro and Ishibashi Hiroyuki,CaF_2 Single Crystal for Semiconductor Lithography(Crystal Growth Technology of Fluoride and Oxide Developed from the Viewpoint of Their Material and Functional Properties),Journal of the Japanese Association for Crystal Growth,03856275,The Japanese Association for Crystal Growth,2006,33,3,135-140,https://cir.nii.ac.jp/crid/1390282680873634944,https://doi.org/10.19009/jjacg.33.3_135