Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) TSUMURA Takumi and YOSHIOKA Hayato and SHINNO Hidenori and SAWANO Hiroshi,C022 Magnetic Attraction Force-preloaded Aerostatic Guideway for High Speed Nano Positioning System,Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21,2424-3086,The Japan Society of Mechanical Engineers,2013,2013.7,0,407-410,https://cir.nii.ac.jp/crid/1390282680875823744,https://doi.org/10.1299/jsmelem.2013.7.407