Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Kaya Kiyoshi and Kanno Yasuhito and Takahashi Hiroshi and Shibata Yoshihiko and Hirai Toshio,Synthesis of AlN Thin Films on Sapphire Substrates by Chemical Vapor Deposition of AlCl3-NH3 System and Surface Acoustic Wave Properties.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,1996,35,5A,2782-2787,https://cir.nii.ac.jp/crid/1390282681222940672,https://doi.org/10.1143/jjap.35.2782