著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Arai Toshihiko and Goto Miki and Takayama Daisuke and Shimizu Tetsuya and Murakami Masahiko,Measurements of Diffusion Coefficient of CF<sub>2</sub> Radical in DC Pulsed CF<sub>4</sub>/O<sub>2</sub> Discharge Plasma,Japanese Journal of Applied Physics,0021-4922,The Japan Society of Applied Physics,1994,33,7B,4170-4172,https://cir.nii.ac.jp/crid/1390282681223849856,https://doi.org/10.1143/jjap.33.4170