Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Matsui Yuichi and Torii Kazuyoshi and Kushida Keiko and Miki Hiroshi and Fujisaki Yoshihisa,Highly Oxidation-Resistant TiN Barrier Layers for Ferroelectric Capacitors.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,1997,36,3B,1586-1588,https://cir.nii.ac.jp/crid/1390282681224403712,https://doi.org/10.1143/jjap.36.1586