著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Bengtsson Stefan and Bergh Mats and Choumas Manolis and Olesen Christian and Jeppson Kjell O.,Applications of Aluminium Nitride Films Deposited by Reactive Sputtering to Silicon-On-Insulator Materials.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,1996,35,8,4175-4181,https://cir.nii.ac.jp/crid/1390282681225332352,https://doi.org/10.1143/jjap.35.4175