著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Sarfaty Moshe and Baum Chris and Harper Michael and Hershkowitz Noah and Shohet Juda L.,Real-Time Monitoring and Control of P1asma Etching,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,1998,37,4B,2381-2387,https://cir.nii.ac.jp/crid/1390282681225455616,https://doi.org/10.1143/jjap.37.2381