著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Hioki Kazuya and Itazu Naoki and Zoran Lj. Petrovic and Makabe Toshiaki,Optical Emission Spectroscopy of Pulsed Inductively Coupled Plasma in Ar.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2001,40,11A,L1183-L1186,https://cir.nii.ac.jp/crid/1390282681228327808,https://doi.org/10.1143/jjap.40.l1183