Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Wakatsuchi Masayuki and Takaba Yoshiro and Kanai Kumiko and Ueda Yoshio and Nishikawa Masahiro,Ion Bombardment Effects on Boron Nitride Film Synthesis by Reactive Sputtering with Electron Cyclotron Resonance Plasmas.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,1999,38,7B,4515-4519,https://cir.nii.ac.jp/crid/1390282681229355904,https://doi.org/10.1143/jjap.38.4515