Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Ido Shunji and Kashiwagi Mieko and Takahashi Mikihiko,Computational Studies of Plasma Generation and Control in a Magnetron Sputtering System.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,1999,38,7B,4450-4454,https://cir.nii.ac.jp/crid/1390282681229515008,https://doi.org/10.1143/jjap.38.4450