著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Chang Ting-Chang and Liu Po-Tsun and Yang Ya-Liang and Hu Jung-Chih and Sze Simon M.,Enhancement of Barrier Properties in Chemical Vapor Deposited TiN Employing Multi-Stacked Ti/TiN Structure.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2000,39,2A,L82-L85,https://cir.nii.ac.jp/crid/1390282681230444672,https://doi.org/10.1143/jjap.39.l82