著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Okada Tatsuya and Kimoto Tsunenobu and Noda Hiroshi and Ebisui Takahiro and Matsunami Hiroyuki and Inoko Fukuji,Correspondence between Surface Morphological Faults and Crystallographic Defects in 4H-SiC Homoepitaxial Film.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2002,41,11A,6320-6326,https://cir.nii.ac.jp/crid/1390282681231552640,https://doi.org/10.1143/jjap.41.6320