著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Seo Yong-Jin and Kim Sang-Yong,Effects of Various Facility Factors on Chemical Mechanical Polishing Process Defects.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2002,41,11A,6310-6312,https://cir.nii.ac.jp/crid/1390282681231553792,https://doi.org/10.1143/jjap.41.6310