著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Eom Dae-Hong and Kim Ky-Sub and Park Jin-Goo,Passivation and Etching of Wafer Surfaces in HF–H<sub>2</sub>O<sub>2</sub>–IPA Solutions,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2002,41,10,5881-5886,https://cir.nii.ac.jp/crid/1390282681233230976,https://doi.org/10.1143/jjap.41.5881