著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Nafarizal Nayan and Takada Noriharu and Shibagaki Kanji and Nakamura Keiji and Sago Yasumi and Sasaki Koichi,Two-Dimensional Distributions of Ti and Ti〔+〕 Densities in High-Pressure Magnetron Sputtering Discharges,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2005,44,20-23,L737-L739,https://cir.nii.ac.jp/crid/1390282681240823936,https://doi.org/10.1143/jjap.44.l737