著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
DeNardis Darren and Sorooshian Jamshid and Habiro Masanobu and Rogers Chris and Philipossian Ara,Tribology and Removal Rate Characteristics of Abrasive-Free Slurries for Copper CMP Applications,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2003,42,11,6809-6814,https://cir.nii.ac.jp/crid/1390282681241215616,https://doi.org/10.1143/jjap.42.6809