著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Sato Tsutomu and Mizushima Ichiro and Taniguchi Shuichi and Takenaka Keiichi and Shimonishi Satoshi and Hayashi Hisataka and Hatano Masayuki and Sugihara Kazuyoshi and Tsunashima Yoshitaka,Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2004,43,1,12-18,https://cir.nii.ac.jp/crid/1390282681242335488,https://doi.org/10.1143/jjap.43.12