著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Miya Hironobu and Shingubara Shoso and Sakaue Hiroyuki and Takahagi Takayuki,Contact Resistance Reduction Using Vacuum Loadlock System and Plasma Dry Cleaning,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2005,44,6A,3860-3863,https://cir.nii.ac.jp/crid/1390282681243450752,https://doi.org/10.1143/jjap.44.3860