Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
YAMAMOTO Yuichi and SHIROTA Naoko and YAMAMOTO Kiyoshi,XPS Depth Profile Analysis of ArF Immersion Resists by using C<Sub>60</Sub> Ion Beam,Hyomen Kagaku,03885321,The Surface Science Society of Japan,2007,28,7,348-353,https://cir.nii.ac.jp/crid/1390282681434149248,https://doi.org/10.1380/jsssj.28.348