Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
KURITA Kazunari and KADONO Takeshi and OKUYAMA Ryousuke and HIROSE Ryo and MASADA Ayumi and OKUDA Hidehiko and Yoshihiko KOGA,Gettering Technology for CMOS Image Sensors Using a Cluster Ion Implantation,Hyomen Kagaku,03885321,The Surface Science Society of Japan,2016,37,3,104-109,https://cir.nii.ac.jp/crid/1390282681435990272,https://doi.org/10.1380/jsssj.37.104