{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1390282681461985408.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.2320/jinstmet1952.51.8_737"}},{"identifier":{"@type":"NDL_BIB_ID","@value":"3144036"}},{"identifier":{"@type":"URI","@value":"http://id.ndl.go.jp/bib/3144036"}},{"identifier":{"@type":"URI","@value":"https://ndlsearch.ndl.go.jp/books/R000000004-I3144036"}},{"identifier":{"@type":"URI","@value":"https://www.jstage.jst.go.jp/article/jinstmet1952/51/8/51_8_737/_pdf"}},{"identifier":{"@type":"NAID","@value":"130007338720"}}],"dc:title":[{"@language":"ja","@value":"ハイブリッドプラズマによる炭化ケイ素微粒子の合成"},{"@language":"en","@value":"The Synthesis of Ultrafine Silicon Carbide in a Hybrid Plasma"},{"@language":"ja-Kana","@value":"ハイブリッド プラズマ ニ ヨル タンカ ケイソ ビリュウシ ノ ゴウセイ"}],"description":[{"type":"abstract","notation":[{"@language":"en","@value":"Ultrafine silicon carbide powder was synthesized from SiCl<SUB>4</SUB> and CH<SUB>4</SUB> through thermal plasma CVD using a “hybrid plasma”, characterized by the superimposition of a DC arc jet on a radio-frequency plasma. For a better understanding of the process, thermodynamic equilibrium compositions for the Ar-H-C-Si-Cl system were calculated up to 6000 K.<BR>The reactants of SiCl<SUB>4</SUB> and CH<SUB>4</SUB> mixed with H<SUB>2</SUB> were injected into an arc jet and a tail flame of the hybrid plasma through a narrow ring-slit, respectively. By this method, the productive reaction zone of SiC is very limited to the space at the slit level, leading to a homogeneous reaction history of each particle. The ratio of [C]/[Si] in the product depended upon the molar ratio of [CH<SUB>4</SUB>]/[SiCl<SUB>4</SUB>] and the total flow rate of H<SUB>2</SUB> used as a quenching gas. Under appropriate conditions, nearly stoichiometric whitish gray β-SiC powder about 30 nm in size was obtained. Moreover, it was found that the particle size could be controlled by regulating the quenching process.<BR>According to equilibrium calculations, SiCl<SUB>4</SUB> is completely dissociated in the plasma, and the main reaction for the formation of β-SiC is believed to be the reaction: Si(g)+CH<I><SUB>x</SUB></I>. Moreover, there was no possibility for the condensed phase except β-SiC to appear during the cooling process from the plasma. Accordingly, the synthesis of very pure SiC powder would not be so difficult if complete reaction occurred in the plasma tail flame. These thermodynamic considerations were consistent with the experimental results."}],"abstractLicenseFlag":"disallow"}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1410282681461985409","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000392799654"}],"foaf:name":[{"@language":"ja","@value":"玉生 良孝"},{"@language":"en","@value":"Tamou Yoshitaka"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Graduate Student, The University of Tokyo"},{"@language":"ja","@value":"東京大学大学院生，現在：三菱金属株式会社中央研究所"}]},{"@id":"https://cir.nii.ac.jp/crid/1030003658319872129","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"00111477"},{"@type":"NRID","@value":"1000000111477"},{"@type":"NRID","@value":"9000021253741"},{"@type":"NRID","@value":"9000391524872"},{"@type":"NRID","@value":"9000020095297"},{"@type":"NRID","@value":"9000258123352"},{"@type":"NRID","@value":"9000020598757"},{"@type":"NRID","@value":"9000257855631"},{"@type":"NRID","@value":"9000401642655"},{"@type":"NRID","@value":"9000350635715"},{"@type":"NRID","@value":"9000020254042"},{"@type":"NRID","@value":"9000243871843"},{"@type":"NRID","@value":"9000024598733"},{"@type":"NRID","@value":"9000253247573"},{"@type":"NRID","@value":"9000020628498"},{"@type":"NRID","@value":"9000020178969"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read0170823"}],"foaf:name":[{"@language":"ja","@value":"吉田 豊信"},{"@language":"en","@value":"Yoshida Toyonobu"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Department of Metallurgy, Faculty of Engineering, The University of Tokyo"},{"@language":"ja","@value":"東京大学工学部金属工学科"}]},{"@id":"https://cir.nii.ac.jp/crid/1030003658426194688","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"00013095"},{"@type":"NRID","@value":"1000000013095"},{"@type":"NRID","@value":"9000020613328"},{"@type":"NRID","@value":"9000021309174"},{"@type":"NRID","@value":"9000392606210"},{"@type":"NRID","@value":"9000392604811"},{"@type":"NRID","@value":"9000392607906"},{"@type":"NRID","@value":"9000256435788"},{"@type":"NRID","@value":"9000007463248"},{"@type":"NRID","@value":"9000392599232"},{"@type":"NRID","@value":"9000016950026"},{"@type":"NRID","@value":"9000256434976"},{"@type":"NRID","@value":"9000017944248"},{"@type":"NRID","@value":"9000350650586"},{"@type":"NRID","@value":"9000021357630"},{"@type":"NRID","@value":"9000392604712"},{"@type":"NRID","@value":"9000392792783"},{"@type":"NRID","@value":"9000392794620"},{"@type":"NRID","@value":"9000256654499"},{"@type":"NRID","@value":"9000254930398"},{"@type":"NRID","@value":"9000021530725"},{"@type":"NRID","@value":"9000256206341"},{"@type":"NRID","@value":"9000020629542"},{"@type":"NRID","@value":"9000021613574"},{"@type":"NRID","@value":"9000392604894"},{"@type":"NRID","@value":"9000392609077"},{"@type":"NRID","@value":"9000392791235"},{"@type":"NRID","@value":"9000392603598"},{"@type":"NRID","@value":"9000007916680"},{"@type":"NRID","@value":"9000018335784"},{"@type":"NRID","@value":"9000021224403"},{"@type":"NRID","@value":"9000007284812"},{"@type":"NRID","@value":"9000350635716"},{"@type":"NRID","@value":"9000020254049"},{"@type":"NRID","@value":"9000392791210"},{"@type":"NRID","@value":"9000008932534"},{"@type":"NRID","@value":"9000253647935"},{"@type":"NRID","@value":"9000256207563"},{"@type":"NRID","@value":"9000392606670"},{"@type":"NRID","@value":"9000392799656"},{"@type":"NRID","@value":"9000256655983"},{"@type":"NRID","@value":"9000007458705"},{"@type":"NRID","@value":"9000017903952"},{"@type":"NRID","@value":"9000254253507"},{"@type":"NRID","@value":"9000392609554"},{"@type":"NRID","@value":"9000020628500"},{"@type":"NRID","@value":"9000020178987"},{"@type":"NRID","@value":"9000021310269"},{"@type":"NRID","@value":"9000392600788"},{"@type":"NRID","@value":"9000392606616"},{"@type":"NRID","@value":"9000392794156"},{"@type":"NRID","@value":"9000007230801"}],"foaf:name":[{"@language":"ja","@value":"明石 和夫"},{"@language":"en","@value":"Akashi Kazuo"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Department of Metallurgy, Faculty of Engineering, The University of Tokyo"},{"@language":"ja","@value":"東京大学工学部金属工学科"}]}],"publication":{"publicationIdentifier":[{"@type":"PISSN","@value":"00214876"},{"@type":"LISSN","@value":"00214876"},{"@type":"EISSN","@value":"18806880"},{"@type":"EISSN","@value":"24337501"},{"@type":"NDL_BIB_ID","@value":"000000018323"},{"@type":"ISSN","@value":"00214876"},{"@type":"NCID","@value":"AN00187860"}],"prism:publicationName":[{"@language":"ja","@value":"日本金属学会誌"},{"@language":"en","@value":"Journal of the Japan Institute of Metals and Materials"},{"@language":"en","@value":"J. Japan Inst. Metals"},{"@language":"en","@value":"J. Japan Inst. Metals and Materials"},{"@language":"en","@value":"Journal of the Japan Institute of Metals"},{"@language":"ja","@value":"日本金属学会誌"},{"@language":"en","@value":"J.Japan Inst.Metals"},{"@language":"ja","@value":"日本金屬學會誌"}],"dc:publisher":[{"@language":"en","@value":"The Japan Institute of Metals and Materials"},{"@language":"ja","@value":"公益社団法人 日本金属学会"}],"prism:publicationDate":"1987","prism:volume":"51","prism:number":"8","prism:startingPage":"737","prism:endingPage":"742"},"reviewed":"false","dcterms:accessRights":"http://purl.org/coar/access_right/c_abf2","url":[{"@id":"http://id.ndl.go.jp/bib/3144036"},{"@id":"https://ndlsearch.ndl.go.jp/books/R000000004-I3144036"},{"@id":"https://www.jstage.jst.go.jp/article/jinstmet1952/51/8/51_8_737/_pdf"}],"availableAt":"1987","foaf:topic":[{"@id":"https://cir.nii.ac.jp/all?q=hybrid%20plasma","dc:title":"hybrid plasma"},{"@id":"https://cir.nii.ac.jp/all?q=production%20of%20ultrafine%20powder","dc:title":"production of ultrafine powder"},{"@id":"https://cir.nii.ac.jp/all?q=silicon%20carbide","dc:title":"silicon carbide"},{"@id":"https://cir.nii.ac.jp/all?q=reactive%20quenching","dc:title":"reactive quenching"},{"@id":"https://cir.nii.ac.jp/all?q=plasma%20processing","dc:title":"plasma processing"},{"@id":"https://cir.nii.ac.jp/all?q=thermodynamics","dc:title":"thermodynamics"},{"@id":"https://cir.nii.ac.jp/all?q=plasma%20chemical%20vapor%20deposition","dc:title":"plasma chemical vapor deposition"}],"relatedProduct":[{"@id":"https://cir.nii.ac.jp/crid/1390282679223464448","@type":"Article","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@language":"en","@value":"The Future of Thermal Plasma Processing"}]},{"@id":"https://cir.nii.ac.jp/crid/1390282679225124352","@type":"Article","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@language":"en","@value":"Development of Thermodynamic Calculation Procedure for Thermal Plasma Processes and its Application to Y–Ba–Cu–O Powder Synthesis"},{"@value":"Development of Thermodynamic Calculation Procedure for Thermal Plasma Processes and its Application to Y&ndash;Ba&ndash;Cu&ndash;O Powder Synthesis"}]}],"dataSourceIdentifier":[{"@type":"JALC","@value":"oai:japanlinkcenter.org:2002213478"},{"@type":"NDL_SEARCH","@value":"oai:ndlsearch.ndl.go.jp:R000000004-I3144036"},{"@type":"CROSSREF","@value":"10.2320/jinstmet1952.51.8_737"},{"@type":"CIA","@value":"130007338720"},{"@type":"OPENAIRE","@value":"doi_dedup___::864a6f0efcbd46b5fd50a9c9191a677d"},{"@type":"CROSSREF","@value":"10.2320/matertrans1989.31.1_references_DOI_YyzwPyHcOKyS872TQWTG0nD7PdC"},{"@type":"CROSSREF","@value":"10.2320/matertrans1989.30.942_references_DOI_YyzwPyHcOKyS872TQWTG0nD7PdC"}]}