著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
HANABUSA Takao and KUSAKA Kazuya and MATSUE Tatsuya and NISHIDA Masayuki and SAKATA Osami and SATO Toshiki,"Evaluation of Internal Stresses in Single-, Double- and Multi-Layered TiN and TiAlN Thin Films by Synchrotron Radiation",JSME International Journal Series A Solid Mechanics and Material Engineering,13447912,一般社団法人 日本機械学会,2004,47,3,312-317,https://cir.nii.ac.jp/crid/1390282681469252480,https://doi.org/10.1299/jsmea.47.312