著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
HAYASHI Toshiyuki and MATSUMURO Akihito and WATANABE Tomohiko and MORI Toshihiko and TAKAHASHI Yutaka and YAMAGUCHI Katsumi,Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition.,JSME International Journal Series A Solid Mechanics and Material Engineering,13447912,一般社団法人 日本機械学会,2001,44,1,94-99,https://cir.nii.ac.jp/crid/1390282681471009920,https://doi.org/10.1299/jsmea.44.94