Precise alignment monitor based on an optical frequency comb (2nd report)

DOI

Bibliographic Information

Other Title
  • 光周波数コムを用いた高精度アライメントモニター（第2報）
  • Measurement for the pulse interval of the optical frequency comb compressed by etalon
  • エタロンで圧縮された光周波数コムのパルス間隔の測定

Description

<p>We aim to develop an alignment monitor which uses a length measurement grid stretched around the object and detects 3 dimensional deformations of the object continuously, where the grid consists of multiple measurement paths of absolute distance interferometers, and consider basic properties of the interferometer based on an optical frequency comb. Here, we measure the pulse interval of the optical frequency comb compressed by etalon for verifying our simulation result.</p>

Journal

Keywords

Details 詳細情報について

  • CRID
    1390282752322643072
  • NII Article ID
    130007702852
  • DOI
    10.11522/pscjspe.2019s.0_914
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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