Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
KIKUCHI Katsuya,R&D of 3D-IC Technology for the AI·IoT Era,Vacuum and Surface Science,24335835,The Japan Society of Vacuum and Surface Science,2019-11-10,62,11,666-671,https://cir.nii.ac.jp/crid/1390282752368019712,https://doi.org/10.1380/vss.62.666