P2-C-17 Fabrication of Functional Sensor using MEMS technology
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- Kaneshiro Chinami
- Faculty of Engineering, Kanagawa Institute of Technology
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- Koh Keishin
- Faculty of Engineering, Kanagawa Institute of Technology
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- Hohkawa Kokji
- Faculty of Engineering, Kanagawa Institute of Technology
Bibliographic Information
- Other Title
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- P2-C-17 MEMS技術による機能センサの作製(バルク波・表面波デバイス,ポスターセッション2(概要講演))
Journal
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- Proceedings of Symposium on Ultrasonic Electronics
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Proceedings of Symposium on Ultrasonic Electronics 24 (0), 151-152, 2003-11-12
Institute for Ultrasonic Elecronics
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Details 詳細情報について
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- CRID
- 1390282763069629824
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- NII Article ID
- 110007458158
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- ISSN
- 24331910
- 13488236
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles