Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
ZHANG Wenlei and TSUCHIYA Toshiyuki and NAKANO Yu and KASAI Takashi and YOSHIMURA Tomohiro and SANO Koji,Tensile Strength of Poly-Si Film for Membrane of MEMS Microphone,"The Proceedings of Mechanical Engineering Congress, Japan",2424-2667,The Japan Society of Mechanical Engineers,2018,2018,0,J2230102,https://cir.nii.ac.jp/crid/1390282763115889792,https://doi.org/10.1299/jsmemecj.2018.j2230102