著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Duan Hao and Morita Shinya and Hosobata Takuya and Takeda Masahiro and Yamagata Yutaka,Profile Measurement Using Confocal Chromatic Probe on Ultrahigh Precision Machine Tool,International Journal of Automation Technology,18817629,富士技術出版株式会社,2021-03-05,15,2,225-233,https://cir.nii.ac.jp/crid/1390287297546324992,https://doi.org/10.20965/ijat.2021.p0225