Fabrication of Tactile Display Mechanism Using Arrayed SMA Thick Film Actuator and Si TSV Layer with Individually Connecting Diode
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- Saito Ryo
- Graduate School of Science and Engineering, Yamagata University
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- Kimura Yusuke
- Graduate School of Science and Engineering, Yamagata University
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- Xu Jiale
- Graduate School of Science and Engineering, Yamagata University
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- Mineta Takashi
- Graduate School of Science and Engineering, Yamagata University
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<p>This paper describes the fabrication of a tactile display with a shape memory alloy (SMA) thick film actuator array bonded to an Si substrate using through-substrate-via (TSV) electrodes and diode elements to realize individual connection without reverse current flow. The SMA actuator array (5×5 array, 2 mm pitch) was fabricated from a flash-evaporated SMA thick film while the TSV substrate was fabricated using a different Si substrate. After large through holes and cavities were etched for the vibrating SMA actuator, the TSV electrodes were formed by double-side sputtering and lift-off processes. The fabricated diode element exhibited a sufficient backward breakdown voltage above 36 V and low forward resistance of 15 Ω. On the fabricated SMA and TSV substrates with through holes, 10-µm and 5-µm-thick SU-8 patterns were uniformly formed, respectively, and then, the substrates were bonded using the patterned SU-8 layers with a bonding strength above 3.5 MPa. Simultaneously, in the bonding process, the electrodes on the SMA and TSV substrates were electrically connected via an Ag paste dispensed in the opening of the SU-8 pattern. Using the proposed processes, we successfully completed the tactile display mechanism with the arrayed SMA actuator , including the TSV substrate with diode elements.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 141 (7), 260-264, 2021-07-01
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390288547259561984
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- NII論文ID
- 130008060182
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 031605888
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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