Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) INOUE Tokio and KATO Chisato and KADOYA Shotaro and MICHIHATA Masaki and TAKAHASHI Satoru,Probe Diameter Correction Gauge for Micro-CMM Using Fabry-Perot Interferometer,Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21,2424-3086,The Japan Society of Mechanical Engineers,2021,2021.10,0,149-050,https://cir.nii.ac.jp/crid/1390292240166924672,https://doi.org/10.1299/jsmelem.2021.10.149-050