Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Miyaji Kohei and Murase Mikio and Yoshimura Takeshi and Fujimura Norifumi,Epitaxial growth of Al<sub>1-x</sub>Sc<sub>x</sub>N thin films on Si substrates using TiN buffer layer,JSAP Annual Meetings Extended Abstracts,2436-7613,The Japan Society of Applied Physics,2021-02-26,2021.1,0,1189-1189,https://cir.nii.ac.jp/crid/1390292472549082240,https://doi.org/10.11470/jsapmeeting.2021.1.0_1189