Analysis of LSAW propagation properties on ScAlN film/rotated Y-cut quartz substrate
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- Suzuki Masashi
- Univ. of Yamanashi
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- Kakio Shoji
- Univ. of Yamanashi
Bibliographic Information
- Other Title
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- ScAlN薄膜/回転Yカット水晶基板上LSAWにおける最適構造探索
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.2 (0), 369-369, 2019-09-04
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390292815261379072
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC