Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Ukibe Masahiro and Go Fujii and kazumasa makise and naoya watanabe and katsuya kikuchi,Development of superconducting through-silicon vias (TSVs) for scalable superconducting qubits,JSAP Annual Meetings Extended Abstracts,2436-7613,The Japan Society of Applied Physics,2019-09-04,2019.2,0,2372-2372,https://cir.nii.ac.jp/crid/1390292815268817792,https://doi.org/10.11470/jsapmeeting.2019.2.0_2372