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Oxygen Effect Analysis of Copper Gettering in Hydrocarbon Molecular Ion Impanted Region Using Atom Probe Tomography
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- Shigematsu Satoshi
- SUMCO
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- Okuyama Ryosuke
- SUMCO
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- Hirose Ryo
- SUMCO
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- Masada Ayumi
- SUMCO
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- Kobayashi Koji
- SUMCO
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- Suzuki Akihiro
- SUMCO
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- Kadono Takeshi
- SUMCO
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- Kurita Kazunari
- SUMCO
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- Koga Yoshihiro
- SUMCO
Bibliographic Information
- Other Title
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- 炭化水素分子イオン注入領域における銅ゲッタリングに対する3次元アトムプローブを用いた酸素の影響解析
- Published
- 2019-09-04
- DOI
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- 10.11470/jsapmeeting.2019.2.0_3676
- Publisher
- The Japan Society of Applied Physics
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.2 (0), 3676-3676, 2019-09-04
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390292815269169536
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC
