Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Ohori Daisuke and Noda Shuichi and Nozawa Yoshiyuki and Liao Bryan and Fujii Ryusuke and Hayami Toshihiro and Kadoi Mikio and Ishida Teruhisa and Tanaka Mami and Sota Masahiro and Endo Kazuhiko and Samukawa Seiji,Development of Minimal Neutral Beam Etching Equipment,JSAP Annual Meetings Extended Abstracts,2436-7613,The Japan Society of Applied Physics,2019-09-04,2019.2,0,3082-3082,https://cir.nii.ac.jp/crid/1390292815284949376,https://doi.org/10.11470/jsapmeeting.2019.2.0_3082