Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Yamaguchi Shuhei and Uemukai Masahiro and Takahashi Kazuya and Iwaya Motoaki and Akasaki Isamu and Hayashi Yusuke and Miyake Hideto and Yamada Tomoya and Fujiwara Yasufumi and Katayama Ryuji,Design of Deep UV Second Harmonic Generation Device with ZrO2/AlN Multilayer Waveguide,JSAP Annual Meetings Extended Abstracts,2436-7613,The Japan Society of Applied Physics,2018-03-05,2018.1,0,3522-3522,https://cir.nii.ac.jp/crid/1390293655509304448,https://doi.org/10.11470/jsapmeeting.2018.1.0_3522