Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Hazaka Shoma and Nishimura Kenta and Ishikawa Hiroyasu,Source Si/C ratio dependence of HMDS-introduced CVD camphoric carbon thin films,JSAP Annual Meetings Extended Abstracts,2436-7613,The Japan Society of Applied Physics,2016-09-01,2016.2,0,1294-1294,https://cir.nii.ac.jp/crid/1390295181703889664,https://doi.org/10.11470/jsapmeeting.2016.2.0_1294