Evaluation of Irradiation Damage on Silicon Surfaces of C<sub>n</sub>H<sub>2n+1</sub><sup>+</sup> Polyatomic Ion Beams
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- Hayashi Kyohei
- Kyoto Univ.
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- Takeuchi Mitsuaki
- Kyoto Univ.
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- Ryuto Hiromichi
- Kyoto Univ.
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- Takaoka Gikan
- Kyoto Univ.
Bibliographic Information
- Other Title
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- C<sub>n</sub>H<sub>2n+1</sub><sup>+</sup>イオンビームを照射したシリコン基板の照射損傷評価
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2014.2 (0), 1481-1481, 2014-09-01
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390296420724396928
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC