Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) SEKIGUCHI Shinichi,Special Issue “The Latest Trend of Dry Vacuum Pumps”,Vacuum and Surface Science,2433-5835,The Japan Society of Vacuum and Surface Science,2024-04-10,67,4,154-155,https://cir.nii.ac.jp/crid/1390299760188979328,https://doi.org/10.1380/vss.67.154