Development of biochips employing plasma process and its future prospect

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  • プラズマプロセスによるバイオチップの開発と展望
  • 最近の展望 プラズマプロセスによるバイオチップの開発と展望
  • サイキン ノ テンボウ プラズマプロセス ニ ヨル バイオチップ ノ カイハツ ト テンボウ

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<p>Various disposable clinical biochips are now developedintensively as one of the µ-TAS (micro-Total Analytical System) technologies.The plasma process, particularly etching technology, is utilized to fabricate fine size channels and structures for the analysis of blood, proteins, DNA, and other biological materials.On this paper, we report on our recent plasma application technologies such as a healthcare chip, an electroosmosis pump, cell sorter chips and a DNA fast-separation chip employing nanopillars, and an affinity assay chip using magnetic beads flown in a channel fabricated using a permalloy.Finally, future prospects are discussed.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 73 (4), 470-475, 2004-04-10

    The Japan Society of Applied Physics

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