-
- ZHAO Xu
- Akita University
-
- SAKURABA Ryuma
- Akita University
-
- MURAOKA Mikio
- Akita University
Bibliographic Information
- Other Title
-
- プラズマエッチングのガス種がらせん状金属ナノ構造体の形成に及ぼす影響
Journal
-
- The Proceedings of Mechanical Engineering Congress, Japan
-
The Proceedings of Mechanical Engineering Congress, Japan 2019 (0), J22203-, 2019
The Japan Society of Mechanical Engineers
- Tweet
Details 詳細情報について
-
- CRID
- 1390565134839876608
-
- NII Article ID
- 130007816554
-
- ISSN
- 24242667
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- Crossref
- CiNii Articles