Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
AZUMA Naoki,Fabrication of Microfluidic Device by Reactive Ion Etching and Focused Ion Beam Milling,JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS,09151168,Japanese Society of Tribologists,2021-10-15,66,10,762-767,https://cir.nii.ac.jp/crid/1390571194132695808,https://doi.org/10.18914/tribologist.66.10_762