著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
KAMOHARA Itaru and WELLING Ulrich and KLOSTERMANN Ulrich and DEMMERLE Wolfgang,"Stochastic Modeling and Local CD Uniformity Comparison between Negative Metal-Based, Negative- and Positive-Tone Development EUV Resists",IEICE Transactions on Electronics,0916-8524,一般社団法人 電子情報通信学会,2022-01-01,E105.C,1,35-46,https://cir.nii.ac.jp/crid/1390572092345000576,https://doi.org/10.1587/transele.2021ecp5010