Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Takeda Kohei and Shichiri Ai and Kanda Kensuke and Fujita Takayuki and Maenaka Kazusuke,Hetero Integration of Ferromagnetic NdFeB and Piezoelectric PZT for Vibratory MEMS Energy Harvesting Devices,IEEJ Transactions on Sensors and Micromachines,1341-8939,The Institute of Electrical Engineers of Japan,2022-04-01,142,4,56-62,https://cir.nii.ac.jp/crid/1390573242795052672,https://doi.org/10.1541/ieejsmas.142.56