Characteristics of the Multi-Coated Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Films by a Chemical Solution Deposition Method
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- Ota Hiroshi
- Osaka Inst. of Tech.,NMRC
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- Inoue Taichi
- Osaka Inst. of Tech.,NMRC
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- Hirofuji Yuichi
- Osaka Inst. of Tech.,NMRC
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- Koike Kazuto
- Osaka Inst. of Tech.,NMRC
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- Yano Mitsuaki
- Osaka Inst. of Tech.,NMRC
Bibliographic Information
- Other Title
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- 溶液塗布熱分解法の繰返しによる強誘電相Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>積層膜の特性
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.1 (0), 1236-1236, 2020-02-28
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390573715143831680
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC