{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1390574677162970112.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.11470/jsapmeeting.2019.1.0_3323"}}],"dc:title":[{"@language":"en","@value":"Characteristics of Molecular Ion Implanted Epitaxial Wafers for CMOS Image Sensor (II) – Basic Characteristics of CH<sub>4</sub>N Ion Implanted Epitaxial Silicon Wafer –"},{"@language":"ja","@value":"CMOSイメージセンサ向け分子イオン注入エピタキシャルウェーハの製品特性（II） –CH<sub>4</sub>Nイオン注入エピタキシャルウェーハの基礎特性–"}],"dc:language":"ja","creator":[{"@id":"https://cir.nii.ac.jp/crid/1410574677162970119","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Suzuki Akihiro"},{"@language":"ja","@value":"鈴木 陽洋"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"株式会社SUMCO"},{"@language":"en","@value":"SUMCO CORPORATION"}]},{"@id":"https://cir.nii.ac.jp/crid/1410574677162970116","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Kadono Takeshi"},{"@language":"ja","@value":"門野 武"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"株式会社SUMCO"},{"@language":"en","@value":"SUMCO CORPORATION"}]},{"@id":"https://cir.nii.ac.jp/crid/1410574677162970117","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Hirose Ryo"},{"@language":"ja","@value":"廣瀬 諒"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO CORPORATION"},{"@language":"ja","@value":"株式会社SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410574677162970115","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Okuyama Ryosuke"},{"@language":"ja","@value":"奥山 亮輔"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"株式会社SUMCO"},{"@language":"en","@value":"SUMCO CORPORATION"}]},{"@id":"https://cir.nii.ac.jp/crid/1410574677162970114","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Masada Ayumi"},{"@language":"ja","@value":"柾田 亜由美"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO CORPORATION"},{"@language":"ja","@value":"株式会社SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410574677162970112","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Shigematsu Satoshi"},{"@language":"ja","@value":"重松 理史"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO CORPORATION"},{"@language":"ja","@value":"株式会社SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410574677162970113","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Kobayashi Koji"},{"@language":"ja","@value":"小林 弘治"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO CORPORATION"},{"@language":"ja","@value":"株式会社SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410574677162970120","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Koga Yoshihiro"},{"@language":"ja","@value":"古賀 祥泰"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"株式会社SUMCO"},{"@language":"en","@value":"SUMCO CORPORATION"}]},{"@id":"https://cir.nii.ac.jp/crid/1410574677162970118","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Kurita Kazunari"},{"@language":"ja","@value":"栗田 一成"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO CORPORATION"},{"@language":"ja","@value":"株式会社SUMCO"}]}],"publication":{"publicationIdentifier":[{"@type":"EISSN","@value":"24367613"}],"prism:publicationName":[{"@language":"en","@value":"JSAP Annual Meetings Extended Abstracts"},{"@language":"ja","@value":"応用物理学会学術講演会講演予稿集"}],"dc:publisher":[{"@language":"en","@value":"The Japan Society of Applied Physics"},{"@language":"ja","@value":"公益社団法人 応用物理学会"}],"prism:publicationDate":"2019-02-25","prism:volume":"2019.1","prism:number":"0","prism:startingPage":"3323","prism:endingPage":"3323"},"jpcoar:conferenceName":"応用物理学会春季学術講演会","jpcoar:conferencePlace":"東京工業大学 大岡山キャンパス","availableAt":"2019-02-25","foaf:topic":[{"@id":"https://cir.nii.ac.jp/all?q=12p-M111-3","dc:title":"12p-M111-3"},{"@id":"https://cir.nii.ac.jp/all?q=molecular%20ion","dc:title":"molecular ion"},{"@id":"https://cir.nii.ac.jp/all?q=CH4N","dc:title":"CH4N"},{"@id":"https://cir.nii.ac.jp/all?q=12p-M111-3","dc:title":"12p-M111-3"},{"@id":"https://cir.nii.ac.jp/all?q=%E7%B5%90%E6%99%B6%E5%B7%A5%E5%AD%A6","dc:title":"結晶工学"},{"@id":"https://cir.nii.ac.jp/all?q=%E7%B5%90%E6%99%B6%E8%A9%95%E4%BE%A1%EF%BC%8C%E4%B8%8D%E7%B4%94%E7%89%A9%E3%83%BB%E7%B5%90%E6%99%B6%E6%AC%A0%E9%99%A5","dc:title":"結晶評価，不純物・結晶欠陥"},{"@id":"https://cir.nii.ac.jp/all?q=%E3%82%B2%E3%83%83%E3%82%BF%E3%83%AA%E3%83%B3%E3%82%B0%E3%80%81%E3%83%91%E3%83%83%E3%82%B7%E3%83%99%E3%83%BC%E3%82%B7%E3%83%A7%E3%83%B3","dc:title":"ゲッタリング、パッシベーション"},{"@id":"https://cir.nii.ac.jp/all?q=%E5%88%86%E5%AD%90%E3%82%A4%E3%82%AA%E3%83%B3","dc:title":"分子イオン"},{"@id":"https://cir.nii.ac.jp/all?q=CH4N","dc:title":"CH4N"}],"dataSourceIdentifier":[{"@type":"JALC","@value":"oai:japanlinkcenter.org:2009847162"}]}