著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Higo Akio and Sawamura Tomoki and Fujiwara Makoto and Lebrasseur Eric and Mizushima Ayako and Ota Etsuko and Ochiai Yukinori and Arakawa Taro and Mita Yoshio,Edge Quality Control of an Optical Racetrack Resonator by Character Projection/Variable-shaped Beam Method to Optimize Pattern Approximation in F7000S-VD02,電気学会論文誌E(センサ・マイクロマシン部門誌),13418939,一般社団法人 電気学会,2022-09-01,142,9,230-234,https://cir.nii.ac.jp/crid/1390574743625631744,https://doi.org/10.1541/ieejsmas.142.230