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Gettering Technology for CMOS Image Sensors Using Cluster Ion Implantation Technique
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- Kurita Kazunari
- SUMCO CORPORATION
Bibliographic Information
- Other Title
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- クラスターイオン注入によるCMOSセンサのゲッタリング技術
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.2 (0), 180-180, 2017-08-25
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390575418085917696
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC