- 【Updated on January 20, 2026】 Integration of CiNii Books into CiNii Research
- Trial version of CiNii Research Knowledge Graph Search feature is available on CiNii Labs
- 【Updated on November 26, 2025】Regarding the recording of “Research Data” and “Evidence Data”
- CiNii Research researchers search function has been released.
Characteristics of Molecular Ion Implanted Epitaxial Wafer (5) - A study of new poly-atomic molecular ion implantation technique -
-
- Hirose Ryo
- SUMCO CORPORATION
-
- Okuyama Ryosuke
- SUMCO CORPORATION
-
- Kadono Takeshi
- SUMCO CORPORATION
-
- Masada Ayumi
- SUMCO CORPORATION
-
- Shigematsu Satoshi
- SUMCO CORPORATION
-
- Koga Yoshihiro
- SUMCO CORPORATION
-
- Okuda Hidehiko
- SUMCO CORPORATION
-
- Kurita Kazunari
- SUMCO CORPORATION
-
- Miyamoto Naoki
- NISSIN ION EQUIPMENT CO,.LTD.
Bibliographic Information
- Other Title
-
- 分子クラスターイオン注入エピウェーハの製品特性（５）-新規多元素・分子クラスターイオン注入技術開発-
Journal
-
- JSAP Annual Meetings Extended Abstracts
-
JSAP Annual Meetings Extended Abstracts 2017.2 (0), 3527-3527, 2017-08-25
The Japan Society of Applied Physics
- Tweet
Details 詳細情報について
-
- CRID
- 1390575418087240448
-
- ISSN
- 24367613
-
- Text Lang
- ja
-
- Data Source
-
- JaLC