Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Hasegawa Yuichi and Ogawa Daisuke and Nakamura Keiji and Park Soonam and Kobayashi Satoru and Sugai Hideo,Microwave Plasma Generation Using Cylindrical Cavity and Solid-State Amplifier Ⅱ,JSAP Annual Meetings Extended Abstracts,2436-7613,The Japan Society of Applied Physics,2016-03-03,2016.1,0,1672-1672,https://cir.nii.ac.jp/crid/1390576922110405632,https://doi.org/10.11470/jsapmeeting.2016.1.0_1672